Four-Point Probes and
Resistivity Testing Equipment
QuadPro Resistivity Wafer Mapping System

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QuadPro Process
Development Resistivity System is available in both manual and
automatic 8" and 12" systems. The manual system
includes a ball bearing stage and can be upgraded at a later
time to add auto-stepping capability. The automatic systems are
motorized and can automatically step through 9, 25, 49, or 121
test points on wafers of size 100 mm, 125 mm, 150 mm, 200 mm, or
300mm. The systems use four point probes with a state of the art
current source and electronic DVM combined with a dual
configuration test procedure and test integration to obtain an
accuracy of better than 1% over the resistivity range from 1
milli-ohm to 2 Meg-ohms per square. The accuracy and calibration
are NIST traceable. The automatic system is fully integrated and
operates under Windows 95/98 with a Pentium based controller. |
Manual Four-Point Probes

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We manufactures
a wide range of resistivity test equipment including economical
four point probe heads, a high temperature four point probe, a
four point probe mounting stand for vertically lowering the
probe head into contact with a substrate (the S-301 shown at the
left), and also a complete resistivity system that includes a
Keithley digital multimeter and a programmable current source. |
QuadPro-301 Manual Four-Point Probe with Computerized
Measurement System

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QuadPro-301 is
a combination of the current source-meter/PC/software used in
the QuadPro mapping system, combined with Signatone's S-301
manual four point probe stand. The QuadPro-301 is used to
measure Resistance or Thickness of layers of conducting
material, calculate the average and standard deviation, log the
data, and export the data to a host system or an Excel file. The
system uses a state of the art current source and electronic DVM
combined with a dual configuration test procedure and test
integration to obtain an accuracy of better than 1% over the
resistivity range from 1 milli-ohm to 2 Meg-ohms per square. The
QuadPro-301 can be upgraded to the QuadPro mapping system. Click
on the photo to the left for further information. |
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