Four-Point Probes and
Resistivity Testing Equipment

QuadPro Resistivity Wafer Mapping System


QuadPro Process Development Resistivity System is available in both manual and automatic 8" and 12" systems. The manual system includes a ball bearing stage and can be upgraded at a later time to add auto-stepping capability. The automatic systems are motorized and can automatically step through 9, 25, 49, or 121 test points on wafers of size 100 mm, 125 mm, 150 mm, 200 mm, or 300mm. The systems use four point probes with a state of the art current source and electronic DVM combined with a dual configuration test procedure and test integration to obtain an accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square. The accuracy and calibration are NIST traceable. The automatic system is fully integrated and operates under Windows 95/98 with a Pentium based controller.

 Manual Four-Point Probes


We manufactures a wide range of resistivity test equipment including economical four point probe heads, a high temperature four point probe, a four point probe mounting stand for vertically lowering the probe head into contact with a substrate (the S-301 shown at the left), and also a complete resistivity system that includes a Keithley digital multimeter and a programmable current source.

 QuadPro-301 Manual Four-Point Probe with Computerized Measurement System


QuadPro-301 is a combination of the current source-meter/PC/software used in the QuadPro mapping system, combined with Signatone's S-301 manual four point probe stand. The QuadPro-301 is used to measure Resistance or Thickness of layers of conducting material, calculate the average and standard deviation, log the data, and export the data to a host system or an Excel file. The system uses a state of the art current source and electronic DVM combined with a dual configuration test procedure and test integration to obtain an accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square. The QuadPro-301 can be upgraded to the QuadPro mapping system. Click on the photo to the left for further information.